Electrical characterization of silicon-on-insulator materials and devices /

Bibliographic Details
Main Author:	Cristoloveanu, Sorin
Other Authors:	Li, Sheng S., 1938-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic, [1995]
Series:	Kluwer international series in engineering and computer science ; SECS 305. Kluwer international series in engineering and computer science. Electronic materials, science and technology.
Subjects:	Semiconductors > Design and construction. Silicon-on-insulator technology. Semiconductors > Electric properties.

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