Polymeric materials for microelectronic applications : science and technology /

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, Polymers for Microelectronics Meeting of the American Chemical Society
Other Authors:	Ito, Hiroshi, 1946-, Tagawa, Seiichi, Horie, Kazuyuki, 1941-
Format:	Conference Proceeding Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1994.
Series:	ACS symposium series ; 0097-6156.
Subjects:	Microelectronics > Materials > Congresses. Polymers > Congresses.

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