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Stress-induced phenomena in metallization : second international workshop, Austin, TX, March 1993 /

Bibliographic Details
Other Authors: Ho, P. S., Li, Che-Yu, Totta, Paul
Format: Book
Language:English
Published: New York : American Institute of Physics, [1994]
Series:AIP conference proceedings ; no. 305.
Subjects:
Semiconductors > Defects > Congresses.
Metallic films > Congresses.
Thin film devices > Defects > Congresses.
Aluminum films > Congresses.
Description
Item Description:"DOE CONF-9303142"--Title page verso.
Physical Description:vii, 302 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1563962519