The chemistry of Metal CVD /

Bibliographic Details
Other Authors:	Kodas, Toivo T. (Toivo Tarmo), 1958-, Hampden-Smith, Mark J.
Format:	Book
Language:	English
Published:	Weinheim ; New York : VCH, 1994.
Subjects:	Electronic circuits > Design and construction. Chemical vapor deposition. Metallic films.

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