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Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Mathur, Jagdish P., Lowell, John, Chen, Ray T.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2337.
Subjects:
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Integrated circuits > Testing > Congresses.

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Call Number: TK7871.85 .O58 1994
 
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TK7871.85 .O58 1994 Available