Cover Image

Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Chen, Fusen E., Murarka, S. P.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2335.
Subjects:
Integrated circuits > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Description
Physical Description:ix, 292 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819416681 (pbk.)