Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Chen, Fusen E., Murarka, S. P.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1994]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2335.
Subjects:	Integrated circuits > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses.

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