64- to 256-megabit reticle generation : technology requirements and approaches /

Bibliographic Details
Corporate Authors:	BACUS (Technical group), Society of Photo-optical Instrumentation Engineers
Other Authors:	Hearn, Gregory K.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Optical Engineering Press, [1994]
Series:	Critical reviews of optical science and technology ; v. CR51.
Subjects:	Microlithography > Congresses. Integrated circuits > Design and construction > Congresses. Integrated circuits > Masks > Congresses.

Remote Storage