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Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies /

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Bibliographic Details
Corporate Author: NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" Frascati, Italy
Other Authors: Gentili, M., Giovannella. Carlo, Selci, S.
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic Publishers, 1994.
Series:NATO ASI series. Applied sciences ; no. 264.
Subjects:
Molecular electronics > Congresses.
Microlithography > Congresses.
Nanotechnology > Congresses.
Integrated circuits > Design and construction > Congresses.
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