Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies /

Bibliographic Details
Corporate Author:	NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" Frascati, Italy
Other Authors:	Gentili, M., Giovannella. Carlo, Selci, S.
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic Publishers, 1994.
Series:	NATO ASI series. Applied sciences ; no. 264.
Subjects:	Molecular electronics > Congresses. Microlithography > Congresses. Nanotechnology > Congresses. Integrated circuits > Design and construction > Congresses.

Remote Storage