Cover Image

Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies /

Show other versions (1)
Bibliographic Details
Corporate Author: NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies" Frascati, Italy
Other Authors: Gentili, M., Giovannella. Carlo, Selci, S.
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic Publishers, 1994.
Series:NATO ASI series. Applied sciences ; no. 264.
Subjects:
Molecular electronics > Congresses.
Microlithography > Congresses.
Nanotechnology > Congresses.
Integrated circuits > Design and construction > Congresses.
Description
Item Description:"Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--Title page verso.
"Published in cooperation with NATO Scientific Affairs Division."
Physical Description:215 pages : illustrations
Bibliography:Includes bibliographical references and indexes.
ISBN:0792327942 (acid-free paper)