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Proceedings : IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994 /

Bibliographic Details
Corporate Authors: IEEE Workshop on Micro Electro Mechanical Systems Oiso, Japan, IEEE Robotics and Automation Society, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Format: Conference Proceeding Book
Language:English
Published: Piscataway, NJ : IEEE Service Center, [1994]
Subjects:
Electromechanical devices > Congresses.
Microelectronics > Congresses.
Detectors > Congresses.
Actuators > Congresses.
Description
Item Description:"IEEE catalog number 94CH3304-1"--Title page verso.
"1994 IEEE Workshop on Micro Electro Mechanical Systems (MEMS)."
Physical Description:xiv, 360 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0780318331 (pbk.)
078031834X (case)
0780318358 (microfiche)