Proceedings : IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994 /

Bibliographic Details
Corporate Authors:	IEEE Workshop on Micro Electro Mechanical Systems Oiso, Japan, IEEE Robotics and Automation Society, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Format:	Conference Proceeding Book
Language:	English
Published:	Piscataway, NJ : IEEE Service Center, [1994]
Subjects:	Electromechanical devices > Congresses. Microelectronics > Congresses. Detectors > Congresses. Actuators > Congresses.

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