Cover Image

Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Bondur, James
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1994]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2091.
Subjects:
Integrated circuits > Design and construction > Congresses.
Semiconductors > Design and construction > Congresses.
Integrated circuits > Heat treatment > Congresses.
Plasma etching > Congresses.
Optical detectors > Congresses.
Description
Physical Description:viii, 462 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.