Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Bondur, James
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1994]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2091.
Subjects:	Integrated circuits > Design and construction > Congresses. Semiconductors > Design and construction > Congresses. Integrated circuits > Heat treatment > Congresses. Plasma etching > Congresses. Optical detectors > Congresses.

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