Cover Image

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme, "Factory of the future" : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts.

Bibliographic Details
Corporate Authors: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass., Semiconductor Equipment and Materials International
Format: Conference Proceeding Book
Language:English
Published: [New York] : [Institute of Electrical and Electronics Engineers] ; [1993]
Subjects:
Semiconductor industry > Congresses.
Semiconductors > Design and construction > Congresses.
Process control > Congresses.
Description
Item Description:"Sponsored by Semiconductor Equipment and Materials International (SEMI) [and others]. Held in conjunction with SEMICON/East 93"--P. iii.
Title on cover: 1993 IEEE/SEMI advanced semiconductor manufacturing conference & workshop.
IEEE catalog number, LCCN and ISBN from label on title page verso.
"IEEE catalog number 93CH3337-3"--Title page verso.
Physical Description:vi, 253 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references.
ISBN:0780313674 (casebound)
0780313666 (softbound)
0780313682 (microfiche)