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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme, "Factory of the future" : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts.

Bibliographic Details
Corporate Authors: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass., Semiconductor Equipment and Materials International
Format: Conference Proceeding Book
Language:English
Published: [New York] : [Institute of Electrical and Electronics Engineers] ; [1993]
Subjects:
Semiconductor industry > Congresses.
Semiconductors > Design and construction > Congresses.
Process control > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7871.85 .I42 1993
 
Call Number Status Get It
TK7871.85 .I42 1993 Available