APA (7th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, & Semiconductor Equipment and Materials International. (1993). IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Factory of the future" : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts. [Institute of Electrical and Electronics Engineers].

Chicago Style (17th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, and Semiconductor Equipment and Materials International. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Factory of the Future" : ASMC '93 Proceedings, October 18-19, 1993, Boston, Massachusetts. [New York]: [Institute of Electrical and Electronics Engineers], 1993.

MLA (9th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop Boston, Mass, and Semiconductor Equipment and Materials International. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Factory of the Future" : ASMC '93 Proceedings, October 18-19, 1993, Boston, Massachusetts. [Institute of Electrical and Electronics Engineers], 1993.