Multilevel interconnection : issues that impact competitiveness : 27-28 September 1993, Monterey, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Hoang, Hoang H.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1993]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2090.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses. Integrated circuits > Very large scale integration > Materials > Congresses. Metallizing > Congresses.

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