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Polymers for microelectronics : resists and dielectrics /

Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format: Book
Language:English
Published: Washington, D.C. : American Chemical Society, 1994.
Series:ACS symposium series ; 0097-6156.
Subjects:
Microelectronics > Materials.
Polymers.
Description
Item Description:"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Physical Description:xii, 571 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0841227217
ISSN:537