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Polymers for microelectronics : resists and dielectrics /

Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format: Book
Language:English
Published: Washington, D.C. : American Chemical Society, 1994.
Series:ACS symposium series ; 0097-6156.
Subjects:
Microelectronics > Materials.
Polymers.

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Holdings details from Remote Storage
Call Number: TK7871.15.P6 P628 1994
 
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TK7871.15.P6 P628 1994 Available