Introduction to VLSI process engineering /

Bibliographic Details
Corporate Author:	Kagaku Kōgaku Kyōkai (Japan)
Other Authors:	Naka, Yūji, 1945-
Format:	Book
Language:	English
Published:	London ; New York : Chapman & Hall, 1993.
Edition:	English language ed.
Subjects:	Integrated circuits > Very large scale integration > Design and construction. Manufacturing processes.

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