Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Kwok, Thomas, Kikkawa, Takamaro, Shenai, Krishna
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1993]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1805.
Subjects:	Integrated circuits > Design and construction > Congresses. Metallic films > Congresses. Metallizing > Congresses. Electrodiffusion > Congresses. Semiconductor-metal boundaries > Congresses.

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