APA (7th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, & BACUS (Technical group). (1993). 12th annual Symposium on Photomask Technology: Proceedings : 23-24 September 1992, Sunnyvale, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, and BACUS (Technical group). 12th Annual Symposium on Photomask Technology: Proceedings : 23-24 September 1992, Sunnyvale, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1993.

MLA (9th ed.) Citation

Symposium on Photomask Technology Sunnyvale, Calif, and BACUS (Technical group). 12th Annual Symposium on Photomask Technology: Proceedings : 23-24 September 1992, Sunnyvale, California. SPIE--the International Society for Optical Engineering, 1993.