Cover Image

Rapid thermal and laser processing : 24-25 September 1992, San Jose, California /

Bibliographic Details
Other Authors: Kwong, Dim-Lee, Müller, Heinrich G.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1993]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1804.
Subjects:
Semiconductors > Heat treatment > Congresses.
Semiconductor industry > Laser use in > Congresses.
Description
Physical Description:vii, 167 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819410020