Rapid thermal and laser processing : 24-25 September 1992, San Jose, California /

Bibliographic Details
Other Authors:	Kwong, Dim-Lee, Müller, Heinrich G.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1993]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1804.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor industry > Laser use in > Congresses.

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