Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

Bibliographic Details
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Baghdadi, A., Scace, Robert I., Walters, E. Jane
Format:	Government Document Book
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, [1989]
Series:	NIST special publication ; 400-82. Semiconductor measurement technology.
Subjects:	Silicon > Measurement > Databases. Silicon > Measurement > Statistical methods. Oxygen > Measurement > Databases. Oxygen > Measurement > Statistical methods. Infrared spectroscopy > Databases. Infrared spectroscopy > Statistical methods.

Evans: US Documents (Annex 5th floor)