Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Vasquez, Barbara
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1993]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1802.
Subjects:	Microelectronics > Congresses. Microelectronics > Reliability > Congresses.

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