Multilayer and grazing incidence x-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Hoover, Richard B., Walker, A. B. C.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1993]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1742.
Subjects:	X-ray optics > Congresses. Grazing incidence > Congresses. Ultraviolet astronomy > Congresses. X-ray lithography > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/1742.toc

Description
Physical Description:	xiii, 702 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819409154 (pbk.)