Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings /

Bibliographic Details
Corporate Authors:	IEEE Robotics and Automation Society, Institute of Electrical and Electronics Engineers. German Section, IEEE Workshop on Micro Electro Mechanical Systems
Other Authors:	Benecke, W. (Wolfgang), Petzold, H.-C. (Hans-Christian)
Format:	Conference Proceeding Book
Language:	English
Published:	[New York, N.Y.] : Institute of Electrical and Electronics Engineers, [1992]
Subjects:	Electromechanical devices > Congresses. Miniature objects > Congresses. Microelectronics > Congresses. Robotics > Congresses.

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