Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California /

Bibliographic Details
Corporate Authors:	Symposium on Microelectronic Processing Integration, Society of Photo-optical Instrumentation Engineers
Other Authors:	Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1992]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1595.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses. Vapor-plating > Congresses.

Description
Item Description:	"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California."--P. ix.
Physical Description:	ix, 207 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819407267