Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California /

Bibliographic Details
Corporate Authors:	Symposium on Microelectronic Processing Integration, Society of Photo-optical Instrumentation Engineers
Other Authors:	Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1992]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1595.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses. Vapor-plating > Congresses.

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