Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California /
| Corporate Author: | Society of Photo-optical Instrumentation Engineers |
|---|---|
| Other Authors: | Gordon, Colin G. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1992]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1619. |
| Subjects: |
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