Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Gordon, Colin G.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1992]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1619.
Subjects:	Vibration > Congresses.

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