Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1992]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1619. |
| Subjects: |
| Physical Description: | ix, 369 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819407577 (pbk.) |