Society of Photo-optical Instrumentation Engineers & Gordon, C. G. (1992). Vibration control in microelectronics, optics, and metrology: 4-6 November 1991, San Jose, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Colin G. Gordon. Vibration Control in Microelectronics, Optics, and Metrology: 4-6 November 1991, San Jose, California. Bellingham, Wash., USA: SPIE, 1992.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Colin G. Gordon. Vibration Control in Microelectronics, Optics, and Metrology: 4-6 November 1991, San Jose, California. SPIE, 1992.
Warning: These citations may not always be 100% accurate.