Cover Image

Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Lucovsky, G., Ibbotson, Dale E., Hess, Dennis W.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1990]
Series:Materials Research Society symposia proceedings.
Subjects:
Plasma-enhanced chemical vapor deposition > Congresses.
Integrated circuits > Design and construction > Congresses.
Description
Physical Description:ix, 250 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558990534