Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors:	Lucovsky, G., Ibbotson, Dale E., Hess, Dennis W.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1990]
Series:	Materials Research Society symposia proceedings.
Subjects:	Plasma-enhanced chemical vapor deposition > Congresses. Integrated circuits > Design and construction > Congresses.

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