Cover Image

Novel silicon based technologies /

Bibliographic Details
Corporate Authors: NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Fla., North Atlantic Treaty Organization. Scientific Affairs Division
Other Authors: Levy, Roland A. (Roland Albert), 1944-
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic, [1991]
Series:NATO ASI series. Applied sciences ; no. 193.
Subjects:
Integrated circuits > Materials > Congresses.
Silicon crystals > Congresses.
Silicon-on-insulator technology > Congresses.
Description
Item Description:"Proceedings of the NATO Advanced Study Institute on Novel Silicon Based Technologies, Boca Raton, Florida, U.S.A., 17-28 July, 1989"--Title page verso.
"Published in cooperation with NATO Scientific Affairs Division."
Physical Description:xii, 277 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0792311124 (acid-free paper)