Novel silicon based technologies /

Bibliographic Details
Corporate Authors:	NATO Advanced Study Institute on Novel Silicon Based Technologies Boca Raton, Fla., North Atlantic Treaty Organization. Scientific Affairs Division
Other Authors:	Levy, Roland A. (Roland Albert), 1944-
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic, [1991]
Series:	NATO ASI series. Applied sciences ; no. 193.
Subjects:	Integrated circuits > Materials > Congresses. Silicon crystals > Congresses. Silicon-on-insulator technology > Congresses.

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