Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California /
| Corporate Author: | Society of Photo-optical Instrumentation Engineers |
|---|---|
| Other Authors: | Singh, Rajendra, Moslehi, Mehrdad M. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1991]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1393. |
| Subjects: |
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