Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Singh, Rajendra, Moslehi, Mehrdad M.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1991]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1393.
Subjects:	Integrated circuits > Design and construction > Congresses. Manufacturing processes > Congresses.

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