Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Singh, Rajendra, Moslehi, Mehrdad M.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1991]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1393.
Subjects:	Integrated circuits > Design and construction > Congresses. Manufacturing processes > Congresses.

Description
Physical Description:	ix, 422 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819404624 (pbk.)