Society of Photo-optical Instrumentation Engineers, Bondur, J., & Turner, T. R. (1991). Advanced techniques for integrated circuit processing: 1-5 October 1990, Santa Clara, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, James Bondur, and Terry R. Turner. Advanced Techniques for Integrated Circuit Processing: 1-5 October 1990, Santa Clara, California. Bellingham, Wash., USA: SPIE, 1991.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Advanced Techniques for Integrated Circuit Processing: 1-5 October 1990, Santa Clara, California. SPIE, 1991.
Warning: These citations may not always be 100% accurate.