Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Bondur, James, Turner, Terry R.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1991]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1392.
Subjects:	Integrated circuits > Congresses.

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