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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors:	Bernhardt, Anthony, Black, Jerry G., Rosenberg, R.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1990]
Series:	Materials Research Society symposia proceedings.
Subjects:	Semiconductors > Etching > Congresses. Semiconductor doping > Congresses. Lasers > Industrial applications > Congresses. Plasma etching > Congresses.

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