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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Bernhardt, Anthony, Black, Jerry G., Rosenberg, R.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1990]
Series:Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Etching > Congresses.
Semiconductor doping > Congresses.
Lasers > Industrial applications > Congresses.
Plasma etching > Congresses.

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Call Number: TK7871.85 .I49 1990
 
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TK7871.85 .I49 1990 Available