Cover Image

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Bernhardt, Anthony, Black, Jerry G., Rosenberg, R.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1990]
Series:Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Etching > Congresses.
Semiconductor doping > Congresses.
Lasers > Industrial applications > Congresses.
Plasma etching > Congresses.
Description
Physical Description:xi, 496 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558990461