Cover Image

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Narayan, J. (Jagdish)
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1990]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1190.
Subjects:
Semiconductor industry > Laser use in > Congresses.
Lasers > Industrial applications > Congresses.
Semiconductors > Etching > Congresses.
Annealing of crystals > Congresses.
Description
Physical Description:vi, 221 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819402265