Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Narayan, J. (Jagdish)
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1990]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1190.
Subjects:	Semiconductor industry > Laser use in > Congresses. Lasers > Industrial applications > Congresses. Semiconductors > Etching > Congresses. Annealing of crystals > Congresses.

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